Description
Brief Introduction:
KJ-T1600-L10030-LC4 is a compact tube furnace system, which consists OD100 single-zone tube furnace, 4 channels precision mass flow meter with gas mixing tank, and rotary vane vacuum pump system.
Technical Parameter:
| Model | KJ-T1600-L10030-LC4 | |
| Part I: Tube Furnace | ||
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Tube Furnace
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Display | 7’’ Touch screen |
| Furnace Structure | Split type and upper part can be opened. Double layer steel casing with air cooling to keep furnace surface temperature lower than 60°C. High purity fibrous alumina insulation for Max. energy saving. |
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| Max. Temperature | 1600℃ for short time | |
| Continuous Woking Temp. | ≤1500℃ | |
| Heating Rate | Suggestion: 0~10℃/min (max. 20℃/min) | |
| Temperature Zone | Double zones 220+220mm |
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| Heating Element | MoSi2 rods | |
| Thermocouple | B type | |
| Temperature Control Accuracy | ±1℃ | |
| Processing Tube | OD80 x 1000mm (OD x L) | |
| Material: High pure Alumina | ||
| Flanges | Flanges made of 304SS Gas valve and pressure gauge on left flange Vacuum angle valve with KF25 connector on the right flange |
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| Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating). | ||
| Temperature Controller | -Two temperature controllers control the heating zones separately. -PID automatic control via SCR (Silicon Controlled Rectifier) power control -30 programmable segments for precise control of heating rate. -Built-in over temperature alarm and protection allows for operation without an attendant. -Furnace with R&S485 communications port and software, which can control on the computer |
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| Power | 220V, 50 Hz, single- phase(or according to your requirement) max.8KW |
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| Part II: 4 Channels Mass Flow Meter and Controllers | ||
| Gas Mass Flow Meter
(touch screen is optional) |
4 precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2: Gas flow range from 0~500 sccm MFC 3: Gas flow range from 0~500 sccm MFC 4: Gas flow range from 0~1000 sccm Please inform us the gas type and measuring range before place order. Flowing rate accuracy: ±1% FS One gas mixing tank is installed on bottom case with liquid release valve 4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually |
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| Part III: Vacuum Pump system | ||
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Vacuum Pump System
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Rotary Vane Vacuum Pump Include KF25 Adpater, bellow for vacuum pump and cart with wheel Ultimate vacuum 10-3 Torr. And vacuum inside the tube is around 10-1 Torr. Flow rate: 2.2L/S |
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| Part IV: Water cooling system | ||
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Water chiller
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Water cooling on the flange is mainly for cooling down the o-ring inside the flange to ensure the best-sealed chamber at high temperature: Water cooling flanges require >= 10L/M water flow. |
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